Study On Driving And Controlling System Of Piezoelectric Micro-moving Platform With Long-Range

Micro-driving and positioning are one of the hottest research topics all over theworld and the key of nano-measurement and nano-fabrication. Micro-displacementactuator is the important part of the system of micro-driving and micro-positioning. Atpresent, piezoelectric ceramic actuator is relatively perfect driving element inmicro-displacement technology. Its appearance inaugurates new times of precision ofnanometer.In this dissertation, the driving and controlling of piezoelectric micro-movingplatform with long-range is introduced. The main contents innovative points include:1, Piezoelectric effect, piezoelectric equation and performance parameter ofpiezoelectric ceramic are introduced.2, The movement principle, mechanical structure design, the controllingsystem and character testing experiments of piezoelectric micro-movingplatform are expatiated in emphasis. In structure design, the structure ofplatform model which buildups its practicability is adopted. The traditionalsingle actuator is updated to double actuators. With the novel principle ofpush-and-pull relay movement which is improved from the principle ofinchworm motion and proper four-channel driving signals, PZT platform canmove continuously and smoothly. As to controlling system, the four-channelsignals from MCU are output to DC amplifier to be amplified and thenloaded to PZT platform. The software is programmed with C51 and theperiod of waveform is controlled in the interrupt mode.3, The principle, design point and sort of power supply of piezoelectric ceramicare also introduced. Design demand, method, circuit and testing parametersof power supply are given. In the design of power supply of PZT, the supplymagnifies and stabilizes voltage directly. Combined with MCU, movementprecision of piezoelectric micro-moving platform is ensured.4, The experiment results show that the motion of the piezoelectric platform islinear, the moving speed can reach 13.68μm/s at the voltage of 200V and theminimal step is sub-micron level, the moving range is more than10mm,carrying capacity is 24N.