Study On The Rotatory Piezoelectric Motor With Micro-angle And Its Driving Power

Micro-driving and positioning are one of the hottest research topics all over the world and the key of nano-measurement and nano-fabrication. Micro-displacement actuator is the important part of the system of micro-driving and micro-positioning. At present, piezoelectric ceramic actuator is relatively perfect driving element in micro-displacement technology. Its appearance inaugurates new times of precision of nanometer.In this dissertation, study on the rotatory piezoelectric motor with micro-angle and its driving power. The main contents innovative points include:1. Piezoelectric effect, piezoelectric equation and performance parameter of piezoelectric ceramic are introduced.2. The principle of rotary piezoelectric motor, the basic conception of flexible joint, the running inflexibility of straight or round flexible joint, the mechanical structure design, the design of driving power, the controlling system and character testing experiments of piezoelectric micro-angle motor are expatiated in emphasis. In structure design, the structure of rotary motor model which adopts compliant mechanisms, not only increases thrust and clamp force, but also magnifies the displacement of piezoelectric ceramic. In this way, the micro-angle with single step comes true. With the principle of push-and-pull relay movement which is improved from the principle of inchworm motion and proper four-channel driving signals, PZT platform can move continuously and smoothly. As to controlling system, the four-channel signals from MCU are output to DC amplifier to be amplified and then loaded to PZT platform. The software is programmed with C51 and the period of waveform is controlled in the interrupt mode.3. The principle, design point and sort of power supply of piezoelectric ceramic are also introduced. Design demand, method, circuit, experiment wave and testing parameters of power supply are given. In the design of power supply of PZT, the supply magnifies and stabilizes voltage directly, which has a amplification of 63 and the current is 60 mA. Experiments show that when input signals are dynamic, such as triangle wave or square wave, its output can follow input very well. The supply may adjust the voltage output continuously from 0～280V when the input ranges from 0V to 5V, with the resolution of 1.575V. The frequency response of the driving power is 100KHz. All these show that the power supply has a stable voltage output, with high...