The Precision Positioning Technology Based On The Advanced Ultrasonic Motor

This dissertation is focused on the ultrasonic motor applied in precisionpositioning stage in terms of working principle and control characteristics. Thefollowing work has been completed:According to the primary characteristic of piezoelectric ceramic that is theanti-piezoelectric effect, the principle of the ellipse track of ultrasonic motor ispresented and the ellipse track of particle of stator surface was proved later.Among these, the working principle of Nanomotion motor is describedespecially.The force transferring model of Nanomotion motor is settled first, based onwhich, the relation between contact angle of rotor and stator and the preload andphysical parameters of friction material is deduced accordingly.The most appropriate PID parameters of Nanomotion motor are obtainedthrough system simulation according to the classic tuning method of PIDparameters. The analog parameters are transformed to digital ones which can beused to motion control card directly via discrete method later.The stage based on the Parker motion control card and Nanomotion motor is setup. Combining to the tuned PID parameters, the test of system controllingparameters and experiment under typical velocity and load have been completed.Then a set of applied application technology and PID controlling method ofultrasonic motors are obtained in succession.The achievements stated in this dissertation provided the theory and datafoundation for the precision positioning system driven by ultrasonic motor, andestablished the foundation for the further research and application in this area.