Multi-Energy Modeling And Simulating Technology Reserch For Electro-Thermal Actuators

Microactuators are critical parts for MEMS to finish the physicalfunctions.The research topic about microactuators is one of the hotspots in theMEMS research fields. The advanced CAD systems have been applied into thedesign and simulation of the IC industry. But most of them are not available forthe design and simulation of the microactuators. The technologies ofmulti-energy modeling and simulating for microactuators are now inexploratory development, because microactuators are complicated systemsinvolving multiple energy. For a long term, there are no good way for thedesign of microactuators except for the prototype testing directly.Electrothermal actuators are typical multi-energy integrated devices and widelyapplied. The researches about the multi-energy modeling and simulating ofelectrothermal microactuators have very important theoretical meanings andapplication value. The main research contents are presented as follows:(1)To integrate multi-disciplinary knowledge to build the multi-energymathematic model of the double-hot-arm electro-thermal actuator. Thetemperature distribution and deflection for the driving voltage are analyzedwith analytic solution.(2)To build the FEM model of the double-hot-arm electrothermal actuatorwith ANSYS. Compare the simulation results with the analytical results.Tobuild the parameterized FEM model of the double-hot-arm electrothermalactuator using ANSYS internal command-APDL and parameterized method. Tostudy the effect to its performance duo to the change of the temperature andstructure parameters.(3)To study modal analysis of the double-hot-arm electrothermal actuatorto gain the several former natural frequency and mode shapes, finally analyzethe results. To study the transient dynamic response of the double-hot-armelectrothermal actuator. The dynamic response under cyclic load is analyzed.To compare the dynamic response under low frequency load with that of highfrequency load.