| The application of MEMS (Micro-Electro-Mechanical Systems) could create conditions for intelligentized and miniaturized fuze in the current war. Due to the application of MEMS to the S&A(Safety&Arming) in fuse, two microactuators were presented, then further analysis for them was carried out.MEMS technology and its applications in fuze were introduced firstly, the position and the current development of microactuators were investigated, formed the basis of these technical background above. Considered the problem of the large actuator size and the poor drive performance in preliminary design, the solution of small size and high drive performance was advanced. This paper presented a suction-type micro-electromagnetic actuator, designed the overall structure, including coil, iron core and skeleton, decided the overall size. The electromagnetic driving force and the associated electromagnetic coil parameters were determined by calculating and finite element analysis. Three groups micro-actuators were chosen for the following experiments. And the S&A model and movement principles of the improved electromagnetic actuator mechanism were proposed in the end.This paper presented another type actuator:electrothermal actuator with a U appearance. Structure size of electrothermal actuator was simulated, the size calculated, and feasibility of arming verified. Furthermore, manufacture craft of this actuator was designed. And the S&A model and movement principles of the electrothermal actuator were proposed in the end.Finally, the microactuator structure has been processed out. The performance testing and anti-high overload experiments showed that the electromagnetic actuator can arm in the 3V, and heating temperature can also meet the requirements and withstand the overload shock more high than 20000g. Electrothermal actuator needed more research to solve the problems in the later experiments... |
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