Magnetic Micro-actuator, Multi-energy Domain Modeling And Numerical Simulation Study

Microactuators are critical parts for MEMS to fulfill the physical functions. The research about microactuators is one of the hotspots in the MEMS research fields. In the IC industry, advanced CAD systems have been used in the design and simulation. But most of these systems are not suitable for the microactuators' design. Because microactuators are complicated microelectrimechanical systems, and no maturate technologies of multi-energy modeling and simulating for microactuators at present. There is short of means and methods to design new microactuators the structure and acting style of that must be compatiole with silicon electrics material and process. In a long period there have no good measures for the design of microactuators except for the prototype testing directly. Magnetic microactuator is a widely used and typical multi-energy (electrics , magnet, mechanics) integrated device. The researches about the multi-energy modeling and simulating of magnetic microactuators have very important theoretical meanings and application value. The main contents of this dissertation includes:In chapter 1, the history and the future of MEMS technology is presented based on the anlysis of literatures at home and abroad; the technology , application , design and questions to be resolved ergently of microactuators are also reviewed and analyzed. By integrating the research requirement the research thoughts and research contents are presented.In chapter 2, the structure character and application fields of various driving mechanisms microactuators such as electrostatic, electromagnetic, piezoelectricity and thermal are reviewed. From the point of view of effect and application their advantage and disadvantage are compared. In this chapter, according as the needs of applications, further more research about the character and application of various magnetic microactuators has been done. The basic physical model of magnetic micromactuators is put forward, and based on this model, two typical physical model are presented: cantilever beam style magnetic microactuators and membrane magnetic style microactuators.In chapter 3, the modeling characteristic and actuality of micro-planer winding magnetic microactuators is reviewed. Based on the basic principle of electromagnetic, the relation between the planer coils and magnet of the basic physical model is calculated. The difference of magnetic field generated by circle coil and rectangle coil is presented. Numerical model about the magnetic force between magnetic fieldgenerated by electric field and the magnet is established.In chapter 4, based on the basic numerical model, a multi-energy such as electricity magnet-mechanics numerical model of cantilever beam style magnetic microactuator is established. Using matching method , the impact on the outer radius of coil and magnetic force resulted from the distance between the magnet and the coil is analyzed. By using the analysis results , structure is designed. Under the various parameters of actuators , numerical simulation is studied by using the finite element analysis (FEA)and how these parameters impact the magnetic force is investigated.In chapter 5, based on the basic numerical model, a multi-energy such as electricity, magnet and mechanics numerical model of membrane style magnetic microactuator is established. Using matching method , the impact on the outer radius of coil and membrane deflection resulted from the distance between the membrane and the coil is analyzed. By using the analysis results , structure is designed. Under the various parameters of actuators , numerical simulation is studied by using the finite element analysis(FEA)and how the membrane and magnet parameters impact the membrane deflection is investigated.In chapter 6, the summaries of all the studies and prospects of microactuators are presented.