Investigation To Multi-phase Alloy By Scanning Kelvin Probe Microscopy

Not only the topography of sample but also its mechanical, chemical and electric properties related to the structure can be observed on a nanometer scale by using AFM in different models.Based on the relevant literatures investigation, we found that it is worth developing an analytical technology that topography and relevant properties can be obtained synchronously by the technology with high resolution. In this thesis we focused on using Scanning Kelvin Probe Microscopy mode (SKM) to characterize multi-phase alloys.Principles of the SKM were discussed as well as relative applications. The relative operating parameters (e.g. dz, Set Point and FB Gain etc.) of AFM were also explored in thesis. We found that the selection of parameters is important to obtain a high quality SKM image. The settings of parameters should be adjusted to sample's morphology.Samples' structure and topography were confirmed by X-Ray Diffraction and Scanning Electron Microscope as accessorial approaches and it was found that the Cu-Pb immiscible alloy films were mainly composed of metal particles as well as some of their oxides.Inhomogeneity Cu-Pb immiscible alloy films, which were sputtered and annealed with different temperatures, were systematically studied by SKM. The relations between the components' distributing, particles size, sputtering temperature and annealing temperature were obtained.Electroless plating Co-P films were also studied by SKM. The topography and surface potential difference images were obtained and thickness of the film was measured.Our studies showed that topography can be obtained with high resolution as well as components' distributing and it can be promoted the study of materials' physical and chemical performance on nanometer scale.