The Study Of Double-Layer Quad-Beams Piezoresistive Accelerometer

This paper mainly discussed the piezoresistive accelerometer. On the basis of the brief introduction of the development of MEMS technology and MEMS accelerometer, the operating principle and the properties of piezoresistive accelerometer were introduced concretely, and the design, fabrication process, package and test of the device were discussed further.A super-stable structure with quad-beams which has favorable synthetically characteristics and highly symmetric structure has been designed, and this help to eliminate the errors caused by the change of the dimension and position of the piezoresistors in structure. Besides, double-layer structure is adopted in this device, that is to say the sensitive layer bonded with one glass cap. The device was simulated by the finite analyses software. Then the layout of the device's structure was drawn using L-Edit. The fabrication process and relevant problems were discussed in detail; meanwhile, some suggestions were presented to solve the problems. Then, packaging and testing has been done. The test results validate our design. Finally, some suggestions and expectation of the further study of the device has been given. A Coplanar triaxial accelerometer and its possibility has been advanced.