The Study Of Ellipsometric Surfaces Lapping New Technology

With the development of the technology , the people's demand for the optical system is increasing , such as formation of a good imaging , luminous energy little losses , small in size , light weight etc. While adopting traditional globular mirror optical system is very hard to accomplish the purpose.The present thesis undertakes systematic theoretical and experimental research in high-speed ellipsometric optical surface parts' lapping with bend-forming ellipsometric surface lapping technology for intermediate aperture aspherical optical parts. Mathematical modeling has been done of lapping tool, based on mathematic and mechanical theories. The width expression for ellipsometric surface lapping tool has been deducted, technology packaging of bend-forming lapping tool has been designed, and a low-cost, easy to operate lapping tool has been fabricated.Experiments indicate that when design lapping, tools with bend-forming theory, the lapping tool should have much higher precision, with the average error of 0.052mm. The lapping experiments show that with bend-forming theory designed lapping tool, it is feasible to realize ellipsometric surface parts lapping process, and the average silhouette error can reach 0.058mm for plastic optical parts. It is concluded form the experimental results that much higher processing efficiency and lower cost can be achieved when using bend-forming lapping tools.