The Electromechanical Coupled Dynamics Of Micro Plate

Micro Electromechanical System is an intelligent device or system, which integrates the sensing, actuation and control of micro structure. The micro plate is a typical MEMS structure. Electromechanical coupling problems are considered as unavoidable multi-physics coupling problems in MEMS. Dynamic characteristics affect the design and working performance of the electromechanical coupled micro system directly. In this paper, the dynamics of an electromechanical coupled micro plate is investigated.A continuous body dynamic model of the electromechanical coupled micro plate under electric field force is presented.The static displacement, the mode function and the natural frequency of the micro plate with three different boundary conditions are solved under electrical field force. The influence of systematic parameters are studied,and how the boundary conditions change affect dynamic perform is also investigated.By means of mode superposition method, the forced responses of the system to harmonic voltage excition, harmonic loads and the combined loads with voltage are solved. When the combined loads with voltage is applied, the change of forced response with systematic parameters is analysed, the"beat"is formed.The electromechanical coupled model of flapping-wing micro air vehicles electrostatic microactuator is established. The static displacement, the mode function and the natural frequency of the moving polar plate under electric field force is studied. The influence of systematic parameters on nature frequency is analysed. The dynamic optimum design method of electrostatic microactuator is presented. Based on this method, the plate parameters is optimized.Using ANSYS software, the solid model of micro plate is given. The modes of micro plate are simulated.The simulation results show that the theory analysis is correct.