| In this paper, the current research achievements on micromachined gyroscope are analysed. A bulk silicon technology based, 2-DOF(Degree of Freedom) and two-degree decoupled gyro structure is raised. The characteristics of the gyro structure is studied.The movement equation of 2-DOF gyroscope is solved. The solution characteristic is analysed after solving. The overall size of gyroscope structure is about 4000μm×4800μm with thickness of 80μm. The size of sensing block is about 1950μm×1510μm. Ansys software is used to analyse the static, modal, anti-overload and decoupling characteristics. According to the simulation, the coupling noise is 1% of the output signal. Under a 1000g impact, the biggest stress which the structure standed is 37.4MPa.A electrophysiological model is established, and the transient response of the gyro is simulated. From the results of the simulation, it is known that with 20V DC bias and 6V peak driving voltage, the driven displacement can reach 0.8×10-5m. When the amplitude of input angular velocity is 1rad/s, the first sensing DOF mass displacement can reach 1×10-8m, and the second sensing DOF mass displacement can reach 0.3×10-8m. The stability time of the gyro is 0.35s.According to the 2-DOF gyro equation, a mathematical model is established, and the modal characteristics is simulated. From the results of the simulation, the bandwidth can reach 500Hz. The sensing modal will have two peaks of 9,987 rad/s and 17,810rad/s, and a minimum value of 2.042rad/s. According to the simulation, 2-DOF sensing can reduce the effect of quality factor.The key technology of gyro production is briefly introduced. The masks is made according to process conditions, and the gyro process simulation is made.
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