Key Technology Research Of The Micromachined Modal Gyroscopebased On Elastic Body

Solidstate micromachined gyroscope is a kind of angular rate sensor. As there is no part moving as a whole, solidstate micromachined gyroscope has a strong ability of resisting shock and pressure. And it doesn't need to be encapsulated in vacuum environment.The traditional mechanical gyro rotor and vibration gyrois inferior compared with solidstate micromachined gyroscope. As the development of MEMS technology, in the recent decades,MEMS gyroscope has been paid more and more attention by researchers as its unique advantages (cheap, small, low power consumption). There are more and more researches on the miniaturization of solidstate gyroscope. Micro solidstate gyroscope has the advantage of solidstate gyroscope and MEMS gyroscope. There will be a bigger development of it.The research has proposed a new micro solid modal gyro, namely for micromachined modal gyroscope based on elastic body(MMGEB). This paper introduces the classification of all solidstate microgyroscope,development and current research situations. Thenthe structure, shape, materials, size parameters of MMGEB ware introduced. ANSYS was used to establish model and to analyze and validate the measurement principle of gyro angular velocity. The gyroscope working vibrationmodal, working frequency and the relationship between sensor voltage and angular rate were foundby means of Finite Element Analysis.In the actual processing, the basement was made using precise milling technology.Then piezoelectric sheet was pasted on the basement surface using conductive adhesive. Driving circuit of sensor was designed and madeto provide the driving voltage to gyroscope driving sensors through the resonant driving way. The key problem is to satisfy the demand of self-oscillation to make gyro vibrate and steady the amplitude. Among them, the automatic gain control (AGC) module is the core components, including theuse of AD603, a variable gainoperational amplifier. There are alsoband pass filter and amplitude detector.Through the research, the MMGEB's research methods had been described and help design the same type of gyroscope in future design work.