Nanotechnology is one of the most advanced technologies that is associated with the researches on the characteristics of the material and the interaction between materials on the atomic-scale. With the rapid development of science and technology, nanotechnology involves in more and more fields, such as mechanics, materials, biology, chemistry, etc. The dynamic displacement measure system with high precision is the basis of the industry, such as mechanism, instrument, weapon system, aerospace industry, etc. It is also the main factor that affects the technique progress of the industry mentioned above. Thus , the optical interferometric measurement which has wavelength-scale resolution is the leading representation in displacement measure realm.This paper comes up with a system research on the principle of dynamic micro-displacement interferometric measurement. The multiplexed fiber interferometer combines two fiber Michelson interferometers, which share the main optical path of the optical system. A voltage change is applied to PZT to modulate the optical path of the reference arm of the measurement interferometer which compensates disturbances, such as vibration and drift of temperature, makes system stability. This system has the advantages of high precision, minor error simple configuration, and insensitivity to the drifts of the light source spectrum.The main research work in the thesis involves:(l) Research on the stability of interferometric optical fiber sensor systems and their phase demodulation techniques; (2) Introducing the virtual instrument technique in the field of dynamic micro-displacement interferometric measurement, establishing the virtual instrument system of optical measurement, and achieving the data acquisition and signal process; (3) To achieve phase demodulation of the interference signals. |