Study On Calibration Theory And Experiment Of A Triaxial High-g Accelerometer

High-g accelerometer is the indispensable inertial measuring device in the field of explosion, shock test and missile penetration trial. In the process of design work for high-g accelerometer, researching calibration theory and calibration experimental method, and calibrating its performance parameters accurately, e.g. its sensitivity parameter, already becomes the key issue and the last step that need to be solved.This dissertation develops the research based on MEMS piezoresistive high-g accelerometer, gives analysis of calibration theory and experimental mothed in-depth. The main content sums up as follows:1. Frequency characteristic of sensitivity for high-g accelerometer has been analyzed, and the bandwidth is calculated when the permissive changement of sensitivity is 5%. Data collecting system for calibrating experiment has been designed according to the characteristic of shock signal for high-g accelerometer.2. Some fundamental knowledge on stress wave, coaxial strike between two bars, propagation of stress wave in the bar and attenuation effect when stress wave spread in the bar has been discussed. Hopkinson bar experimental equipment is introduced, and the principle of calibration using Hopkinson bar is analyzed in detail. Then simulation results of the strike process is list by ANSYS software.3. Typical waveform collected by striking of Hopkinson bar has been analyzed in detail. The performance parameters of triaxial high-g accelerometer have been tested and calibrated. The sensitivities of Z,X,Y axis are 2.204μV /g,2.009μV /g and 1.953μV /g respectively. Cross-axis sensitivites are all below 2.5%. The linearities are 2.08%,1.73% and 1.85% respectively.4. Validating experiment for calibration results has been done using a standard accelerometer, and the relative errors of sensitivities calibrated are 7.6%,6.7% and 9.7% respectively. Error sources that influence the results of calibration have been analyzed in the end.