| Micropump is an important branch of micro-electro-mechanical systems (MEMS) and it could find applications in the fields of environment testing, biotechnology and instrumentation for analytical chemistry. In this paper, we describe the design, fabrication, numerical simulation and experimental study of a novel micropump that delivers continuous, ultra-low flow velocities at 0-55μl/min. A gradient capillary surface is patterned such that the gaps between microposts reduce gradually away from the center microwell to surface edge, by which a capillary force gradient formed to transport the liquid continuously combining with the traction effect of surface evaporation. Various factors affecting the performance of the pump were studied and theoretical predictions along with experimental results are presented.
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