Design Of Micro/nano Coordinate Measuring Machine Structure And Analysis Of Uncertainty

With the nano-test technology development, new and higher requirements for performance and precision, people improve the ways to make the performance of coordinate measuring machine through the traditional coordinate measuring machine, but to achieve nanometer precision measurement, there are many problems must be resolved. Therefore optimizing the design of the main structure, reducing the force deformation and thermal deformation, improving the stability of the measuring machine become important for the Research.The design of a new arch-pavilion Nano-CMM structure was introduced by the application of ANSYS to the Nano-CMM structure optimization design. This new structure is developed based on the analysis of conventional Nano-CMMs.The analysis and comparison were made through ANSYS,we can prove the superiority of the structure for imprving performance and accuracy.we have designed the main structure of nano-CMM micro cantilever, given the specific values of every part and assembly, and processed a physical machine. At the same time, analyzing the main structure of the weight and modal to obtain the specific parameters of the structure to understand the characteristics of the structure. Meanwhile, the error sources of the cantilever measuring machine in the project have been analyzed and the accuracy has been distributed.Through the design of different structures, and analysis according the accuracy, we have a further insight into the advantages and disadvantages of various structure and provide a new direction for the future of such issues.