| Oil free scroll vacuum pump, a kind of oil free volume vacuum pump, has been widely applied in many microelectronic branches all over the world because of its simple structure, low noise, high reliability, good pumping performance and so on. To meet our country's development and manufacture of the oil free scroll vacuum pump, this thesis has made some deep research on oil free scroll vacuum pump's computer simulation of moon—shape sealed vacuum cavity pressure field and air vent velocity field.The oil free scroll vacuum pump applies in the places where working conditions request very high clean degree, so the pump housing pressure distributions changes and the velocity distribution changes are important facts to understand oil free scroll vacuum pump's working principle, efficiency and reliability. This research's subject is carried on dynamics analysis through mathematics modeling and the finite element method to the oil free scroll vacuum pump's vector flow, and also carried on the analysis and the analog simulation by using the ANSYS analysis software, thus obtained important information about vector flow's pressure distribution and speed of flow distribution.Using the synthesis hydraulics and hydrodynamics'related theories, in the moon shape sealed vacuum cavity the flow field mathematics formulas are obtained; Meanwhile, carried on the value operation by using the C++ language programming, simulates the internal pressure change curve of vacuum cavity during the process of packing, and aslo has established the three dimensional full—cale mockup of symmetrical month cavity in UGS NX 4.0; In addition, taking the air vent velocity field as the object of study, obtains the air velocity field distribution map and the center track velocity distribution curve. The analysis resul, which confirmed the pressure field change rule and the speed field distribution rule, has provided the foundation for further optimization design.
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