Research Of Dynamic Characteristics And Technologic Parameters Optimization Of High Precision Double-sided Polishing Machine

With the rapid development of science and technology，Sophisticated techniques havebecome increasingly demanding for precision. Ultra-precision polishing technology is animportant indicator to measure the development level of manufacturing, Ultra-precisionpolishing technology is widely used in aerospace, military, integrated circuits, civilianequipment and many other areas. But, compared with developed countries, domesticdevelopment level is still relatively low, the processing rely more on experience, lowprocessing efficiency and low yield. To solve this problem, I started the high-precisiondouble-sided Polishing Machine research in this paper.Using the virtual prototyping technology that widely used for advancedmanufacturing in recent years, the paper did dynamic characteristics and processparameters optimize for the high-precision double-sided polishing machine. Therelationship of the process parameters, the work piece force state, the trajectory of workpiece, removal rate and the product yield rate have been focused study, by changing theprocess parameters to achieve the best machining results, increase productivity, improveyield.The main contents are as follows:1.Based on the theoretical analysis and calculation, deducing the mathematical modelof the work piece’ orbit. Creating the virtual prototype model by the three-dimensionalsolid modeling software Pro/E and dynamics analysis software ADAMS.2.Through the qualitative analysis and quantitative analysis of the virtual prototypemodel to verify the correctness of the model, on this basis, perfected the prototype model.Through the virtual prototype model to analyze the affection on the polishing results byprocess parameters and the motion state of the work piece.3. Based on the multi-body system dynamics theory, using virtual prototypingtechnology and ADAMS, ANSYS co-simulation method, established the rigid-flexiblecoupling model of the main drive system of polishing machine. By studying the vibrationcharacteristics of the system, selecting the appropriate process parameters, to minimize thevibration of the machining process and improve yield. Taking the trajectory of the work piece as the evaluation index of polishing uniformity, On the basis of polishing uniformity,to optimize the design, choose the best process parameters and improve product quality.Research on this paper has guiding significance for the actual production, and offerreference for further research on high-precision double-sided polishing machine that ismore accurate and machining thinner work piece.