Argon Glow Discharge Cathode Sheath Region Microscopic Characteristics

The technology of plasma discharge have been widely used in many fields, the cathode fall region is the most important region in the discharge. Recently, efforts have intensified to study the microcosmic characteristic of this field , which is important for the plasma etch , material cure , material topdressing and thin film deposit.In this dissertation, the microcosmic characteristics in the cathode fall region of argon DC glow discharge is researched in detail. We found a new model of this field , and we calculated the self-consistent electric field, the energy distribution and the angular distribution of the ions ,the energy distribution and the collision scattered angular distribution of the electrons using the model. These studies must will be important for the thorough recognize of the mechanics of the glow discharge .Differing from other models, we use the collision cross section depended with the particles energy and the PIC-MCC method to study the behavior of the charged particles .I developed the simulation program all by my self and it accords with the criterion of software engineering and commendably combines the object-oriented technology with the PIC-MCC method. In order to validate the dependability, we inspect the energy change and compare the results with the existent result in the same condition, all that we did can prove this program is credible. And I also wish that my program can become a part in the works of general-used PIC software.