Development Of Multifunctional Grinding And Polishing Machine

With the increasing application of chemical mechanical polishing(CMP)technology,stricter requirements are put forward for CMP hardware.At present,most of the CMP equipments used in laboratories are rotary swing gravity polishing machines.This polishing machine structure and components are simple,the accuracy meets the experimental requirements,and the requirements for the experimental conditions and environment are not high,but the control of the parameters of the grinding and polishing process cannot be realized.It directly affects the quality and processing efficiency of grinding and polishing.Therefore,the realization of self-adaptive loading of the grinding and polishing machine and the detection and control of process parameters have a great impact on CMP technology.In this paper,the self-adaptive pressure loading of the grinding and polishing machine is designed,and the surface friction coefficient of the polishing disc during the polishing process can be detected in real time,which is of great help for the real-time observation of the polishing effect and the observation of the polishing end point,and can greatly improve the efficiency of chemical mechanical polishing.and quality.At present,the collection of process parameters of CMP equipment in China is designed from the polishing head,and the process parameter signal collection is carried out under the condition that the polishing head does not move and the polishing disc rotates.This is not in line with the actual polishing process,and there is a larger error will affect the grinding and polishing effect.The main research contents of this paper are as follows:(1)Theoretical analysis and design of the mechanical structure of the multifunctional grinding and polishing machineThis paper mainly designs a multi-functional grinding and polishing machine,including the grinding and polishing part,the grinding and polishing pressure loading part,and the distribution design part of the sensor for measuring the parameters of the grinding and polishing process.The design is simple in structure,reasonable in overall size,convenient in operation,and can achieve precise polishing for crystal materials and metal materials.In this paper,the mathematical model of the movement and force between the polishing disc and the workpiece to be polished during the grinding and polishing process is first established,and the magnitude and direction of the friction force and pressure on the surface of the polishing disc during the grinding and polishing process are calculated.The selection of sensors,etc.is the theoretical basis;secondly,the mechanical moving part of the basic polishing machine,the selection and arrangement of pressure,torque and displacement sensors,and the pneumatic pressure part are designed after calculation.According to the mechanical moving part of the basic polishing of the grinding and polishing machine,analyzing and selecting the polishing disc and polishing head motor,ball screw,screw servo motor,guide rail and other components.(2)Chemical mechanical polishing machine modeling and mechanical characteristics analysisThe three-dimensional modeling of the polishing machine is carried out by using Solidworks,and the dynamic and static characteristics of key components were analyzed.Establish a simplified three-dimensional model of the polishing disc relative to the workpiece to be thrown,The three-dimensional model established is analyzed for the finite element transient dynamic characteristics by using ANSYSY workbench finite element software.The deformation and stress distribution of the grinding and polishing disc are caused by the changes of the grinding and polishing process parameters such as the speed of the disc and the polishing pressure;at the same time,the static and modal analysis of the spindle bushing at the lower end of the grinding and polishing machine,the overall frame structure and the gantry part are carried out.The designed structure is verified by static analysis to see if it meets the strength requirements.Through modal analysis,resonance can be avoided in the process of machine tool operation,thereby preventing the machine tool from being damaged due to vibration.(3)Dynamic characteristics analysis of 304 stainless steel process systemUsing the modal module in ANSYS workbench,the modal analysis of the chemical mechanical polishing process system of 304 stainless steel is carried out,and the natural frequency that is prone to resonance is obtained,so as to provide a basis for the improvement of the polishing disc of the grinding and polishing machine.