Design Of Grinding And Polishing System For Thin-walled Microstructures And Study On Processing

With the development of science and technology and the the expansion of the productive forces, micro-components are widely used in various fields. It brings up higher standard for all indices of micro-components and also requires innovation and renewing of related micro manufacturing equipment and technique. At the meanwhile of the high development of new micro manufacturing technique, the traditional mechanical processing method has expansive development and application prospect because of its high efficiency and low cost. Meanwhile, micro machine tool has lots of advantages such as unchanged accuracy, low energy cost and easy to control compared with tranditional machine tool. How to manufacture micro-components with micro machine tool has strong practical applications.This paper designed a table grinding and polishing system for a kind of thin-walled microstructures component to wipe of the deterioration layer on the component surface and improve its performance. The overall structure of the grinding and polishing system has been designed and implemented. The long travel and high precision macro and micro multiple motion table is used in the feeding direction to feed accurately. The random grinding and polishing trajectory is composed of two motion tables'componental movement. The system's overall control scheme has been designed and implemented. The state of grinding and polishing is fed back by means of grinding and polishing force signal and position signal on the basic of micro force perception device to control the grinding and polishing process precisely.The paper analysed the tool setting demand of the component and designed tool setting scheme which achieves submicron precision by means of the contact perception function of the micro force perception jig. The auto tool setting scheme without CCD's assistant has been designed according to the structure of the component. The control scheme of the macro and micro multiple motion system has been designed according to the requirements of the grinding and polishing process and built up closed loop control system. The paper compiled control program of grinding and polishing system on the basic of such methods and carried out experiments of tool setting and macro and micro motion system which proved the correctness of these control methods.The paper carried out grinding and polishing experiments of the thin-walled micro component. Single feeding amount, grinding and polishing trajectory, grinding paste and remove quantity were studied respectively in experiments. The technology has been established and the component was measured and analysied before and after processing. The result confirmed the feasibility of the grinding and polishing system and technology. The paper analysed the force signal in grinding and polishing process and proved the possibility of measuring the component while grinding and polishing.