| Rare earth doped strontium aluminate thin film is a promising candidate for applications such as real-time visual detection without any contacts, mechanical stress sensing, nano-scale optoelectronic devices, two-dimensional temperature sensing, and thin-film solar cells. To prepare thin films with excellent properties, fabrication procession of high-performance ceramic targets were investigated firstly.Sr Al2O4:Eu2+,Dy3+ceramic targets were fabricated by manufacturing process of traditional ceramic. The preparation technology of Sr Al2O4:Eu2+,Dy3+ films were explored by a combination of the radio frequency magnetron sputtering technique. The results are listed as follows:1. The sintering temperature of Sr Al2O4:Eu2+,Dy3+ ceramic target without flux was fixed at 1600 ℃ by comparing the relative density of ceramic targets, which were sintered at different temperature. The relative density of ceramic targets increased with the increase of sintering time; Whereas it deceased with continuine increasing of sintering time; The best sintering time was fixed at 14 h. The relative density of ceramic targets is only 79.30%.2. Both characteristic emission of Eu2+and characteristic emission of Eu3+, which originated 4f65d1â†'4f7 and 5D0â†'7F2 respectively, were observed when ceramic targets were sintered at air atmosphere. It reveal that the Eu2+ in Sr Al2O4 host possess self-reducibility.3. The result of X-ray photoelectron spectroscopy(XPS) showed a small portion of Sr,Al atom and a great quantity of O atom were deposited on the substrate when sputtering yield is serious low.4. Continuous broadband emission peak between 400 nm and 500 nm was observed after Si substrate postannealed. The intensity of emission peak is affected by annealing atmosphere and temperature. |
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