| Based on polishing mechanism, the relations between polishing parameters and polishing efficiency and precision are discussed, the realizable method of control which can be industrialization is put forward. The polishing machine is the most precision master, the polishing effect is influenced by many parameters directly or indirectly. The paper describes the key technique of hardware on the pad operation, the temperature of slurry and the plane conditioning of pad and the technique of control detailedly. The method of control based on rules is applied to the operation of pad, so that the mode of slow acceleration-steady rotating-slow deceleration accurate location is obtained the rotating stability is up to 5‰, and the location precision is up to 0. 4°, with the rotate speed from 2 to 120rpm; The intelligent control based on information with the captivity of autonomic study is adopted to control the temperature of slurry with the stability up to 0. 3℃; Based on the mechanism of Electrical Discharge Machining(EDM), the method of plane conditioning is described, and a special pulse generator for EDM is developed to obtain the tiny fuzzy feed of the pole in the operation of delicate modification. The electromagnetic compatibility and the reliability of the polishing machine are considered. Finally, the whole process is analyzed with crystal as the workpiece, ultra-smooth surface of the maxium roughness waves between 1 to 2nm(up to 0. 2nm under the perfect state) is obtained, and the efficiency and the consistency of the product quality are improved markedly, according to the measure dates from talystep with the polishing machine. |
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