Design And Experiments Of A Three-dimensions Micro-edm Stage

Along with the development of technology, the dimension used in manufacture evolves from micron to nanometer. The development and popularization of precision manufacture and super precision manufacture evolves the manufacture level, increase the machine produces quality, and raise the competitive power.The super precision manufacture technology would be the most important progress, which is various and important. The super precision manufacture is a symbol of the manufacture level in a country, and is a key technology of national defense.The paper aimed at this demand, to develop a new multi dimension, low speed, nanometer level precision minute electric spark forming system. The electric spark forming system developed in the paper is consisted of the models such as electric spark impulsing power source, three-dimension super precision stage, electric spark head stock, environment maintain, monitoring detection etc.The developing of a three-dimension super precision stage is the base of system. By all-around argumentation, the travel of each dimension is beyond a hundred millimeter and with nanometer level precision, LS series piezoelectric ceramic linear motion actuator of Nanomotion are used in the three dimensions of the stage to meet this demand. The linear motion actuator has excellent resetting precision and infinitesimal servo wobble. For the static hold force of the motion actuator is insufficiency, gravity balance device must be designed, which increase the complexity of the stage. Rational feedback device should be used in the stage for super precision, and then full closed loop feedback is used in the stage. The feedback device used in stage is open type grating encoding of Renishaw. By through the test of 100nm phase step, though it is not full meet the final demand still, the stage has excellent precision.To get higher precision, system error should be compensated in the control system, so the error model of stage has been found. Error matrix method has been used to found the error model of stage. Abbe error is considered in the model. The error identity method is brought forth also.The electric spark impulsing power source used in system is equivalent impulse width transistors impulsing power source, which has 80ns impulse width. Compared with traditional RC electric spark power source, manufacture speed use the electric spark impulsing power source can be increased two or three times.A three-dimension minute electric spark forming system is constructed by appropriate communication between models, through primer manufacture, feasibility test has anticipation result.