Of Pet Based Nano-tio <sub> 2 </ Sub> Membrane Sputter Deposition And Surface Structure And Performance

In order to find a new way to prepare antibacterial fibers , photocatalytic oxidation of titanium dioxide (TiO2) has been used to modify the surface property of polymers in our experiment.TiO2 films are deposited on Polyethylene terephthalate (PET) substrates by means of Rf magnetron sputtering using pure Ti (99.99%) as the target and Ar mixed with O2 as reactive gas.The morphology of the sputter-deposited films were observed by Scanning Electron Microscopy (SEM) and Atom Force Microscopy (AFM). The effect of the power, discharged pressure, sputtering time and the ratio of Ar/O2 on morphology has been studied. It was found that an uniform and compact TiO2 nanoparticulate film can be deposited on PET substrates in a short time, and it's thickness increases with the treating time. When the thickness comes to a critical value, there grows a greater size cluster on the nano-sized film. This is an interesting film growing pattern, which has never been reported. Moreover, the TiO2 film particles distribute more uniform and join tightly with the increasing of power, but the surfaces of films become closer and smoother when pressure increased or the ratio of oxygen decreased.The molecular structure of the sputtered titanium oxide films were investigated by XPS and X-ray diffraction. It was found that the ratio of Ti/O increases when pressure increases, and there is a optimum ratio of Ar/O2 for the sake of obtaining more TiO2 on PET surface. Furthermore, the deposited films in our experiment are amorphous.TiO2 thin films were also deposited on PET fabrics by sputtering, and their application properties including antibacterial capability and fastness were studied. The results showed that the sputtered films have anantibacterial performance and a good fastness obviously. All of them indicate that the method using magnetron sputter deposition to produce thin antibacterial film on PET is feasible.