Afm Measurement Of Characteristics Of Study

Nano Science&Technology is the one of the four most important fields in the 21 century global technology development. "Nano" will penetrate into lots of fields such as nano-biology, nano-material, nano-measurement, nano-electronics and so on. For making nano-dimension to be realized, nano-metrology is imperative to do. Presently, the manufacture of traceable standard device, the international comparisons of tracing standard, the research and manufacture of Metrological Scan Probe Microscope series (MSPMS), the tolerance correction of measure results and the building of SPM measuring uncertainty etc. are all the research hotspots of current metrology research in the world.Based on the detailed analyzing the research status of world nano-metrology and our real condition, this paper will focus on studying the operation modes of AFM probe, the measurement of AFM for one-dimension grating shape, calibrating the operating characteristics of X-Y plane and Z axis of AFM by using one-dimension grating shape, and reflecting the AFM measuring precision based on FT and FFT solving the grating periodic structure. After that, this paper will finish the general design of MAFM with double F-P on the basis of national nature foundation and key project of education ministry. Followings are the major research contents. Firstly, this paper will discuss several operation modes of AFM probe on the basis of basic vibrating principle, especially the small amplitude vibration research of cantilever in the AC tapping mode. The key and difficult point is how to meet the measure requirements of stability, atomic level precision and resolution and theoretically prove the advantage of sub-resonance AM of small amplitude mode, and realize the linear relationship of the interaction force between probe and sample surface through the selection of several parameters such as cantilever rigidity, quality factor and interaction rigidity. This is a new research field of probe working modes. Secondly, this paper will discuss how to do "partitioning and several times" measure in the condition of assuring measure environment requirements can be met during the process of measuring one-dimension grating with AFM. And then, this chapter will discuss and analyze the tolerance correction of single grating shape measurement results with SPIP software and successfully realize the calibration of three dimension moving characteristic of AFM. At the same time, this paper will verify the calibration repentance through analyzing most parts of scanning pictures several times. Finally, this chapter will give the results of grating period through noise processing of grating figures with Fourier frequency spectrum, window function and filtering.Thirdly, while designing MAFM with double F-P interference, the paper will discuss how to integrate the PZT drive system with interference system. The design will include two solutions, one has only traceable function, and the other has both tracing and position functions, mainly discussing how to realize Z axial positioning through using interference system and probe. Moreover, this chapter will also discuss how to transfer interference signals to probe displacement value and how to design three dimensional interference system optical sources.For the key and difficult points of each chapter, this paper presents the full-scale theory calculations and does lots of experiments and proves the linear relationship of the force between probe and sample surface in the small amplitude mode of cantilever AM sub-resonance that is the foundation for improving AFM probe working characteristics. After calibrating the AFM three-dimensional characteristics with SPIP, make the mean position error has been reduced to sub-pixel level. At the same time; the tolerance correction of Z-axis obtains the premium value (r=0.9986) through long time continuous measure and verifying the repentance of calibration system. The design solution of MAFM realizes both tracing and position functions with double F-P interference system, while using one He-Ne laser and one 1×3 fiber splitter as optical source rather than the three sets of He-Ne laser as other system.