Study On The Measurement Head Mechatronic System Of The Dual-probe AFM

In modern integrated circuit manufacturing technology more and more electronic components are accommodated on the chip, and the size of the MOS tube is smaller and smaller. Major chip manufacturers are competing for this piece of Blue Ocean, at the same time the measurement of Micro/Nano size of integrated circuits is also put forward for higher requirements. Measurement of Micro/Nano size of the line width on the surface is one of the main factors that characterize the width of the integrated circuit chip, from a certain extent determines the performance of the integrated chip. Atomic Force Microscopy is widely used in integrated circuit line width of Micro/Nano level measurement with its advantages of Ultra-high resolution and used in the area of measurement non-conductive samples. However, due to the size and shape of the Probe may produce certain influence to the measurement result, therefore the existing Atomic Force Microscope can’t accurate characterization of the sample line width, morphology and surface information. This thesis is supported by the National Key Technology Support Program “Research on standard device of Metering type scanning electron microscopy and dual-Probe atomic force microscope”(Grant No. 2011BAK15B02), conducting a study on dual-Probe Atomic Force Microscope linewidth measurement techniques, aimed to establish a truly characterizing the morphology of the sample linewidth dual-Probe atomic force microscope system.Firstly thesis analyzes several common ways of line width measurement and the important application of Atomic Force Microscope in Micro/Nano measurement in presented, while introduce the Atomic Force Microscope research status in domestic and international, and a simple analysis of the commercial Atomic Force Microscope measuring principle and methods of measurement. Through theoretical analysis to determine the dual-Probe Atomic Force Microscope measurement method, completion of the mechanical design dual-Probe Atomic Force Microscope system and finite element analysis on the basis of the above theory, and then use the stylus system to alignment two Probes and sample scanning methods were studied, at last the corresponding alignment method and scanning methods are given. The dual-Probe Atomic Force Microscope system is constructed by quartz tuning fork Probe named A-Probe, Nano positioning P-363.2CD and P752.2CD, Lock in amplifier HF2 LI and so on.In order to verify the feasibility of dual-Probe Atomic Force Microscope system, an experimental setup was constructed and some experiment were conducted as follow:(1) Analysis the stability of system, offset by a quartz tuning fork Probe tip coordinates to determine the stability, the experimental results prove that the system drift stability nanoscale Probes and the system is stable;(2) Alignment of two quartz tuning fork Probes, within the field alignment the two Probes and the distance between the two Probes can reach 1μm, in subsequent alignment scanning near-field force, to achieve the dual Probes aligned by 1nm step;(3) A standard sample was measured by using a single quartz tuning fork Probe named A-Probe, The width and surface morphology information of sample to be tested can be obtained by analysis of the measurement results, and the experimental results were compared to business and commercial scanning electron microscope and Atomic Force Microscope scanning result to verify the feasibility and stability of our system.