Based On The Fuse Explosion-proof Structural Design Of Mems Technology And Technology Research

Micro-Electro-Mechanical Systems (MEMS) is a hot topic of science and industry in the 21^th century, and many industries have been and are being changed by it. The security system is one of the important parts of the fuze, and is the key of the weapon to go into effect. The miniaturization of the security system of fuze is the key technique and a handcap for the development of the small caliber ammunition. And the adoption of MEMS technology will help to resolve this problem, which will have significant influence on the development of fuze.In this thesis, an interrupter is designed for a new micro-electro-mechanical security system. And a simulation machine is designed based on this interrupter, which lays the foundation for the further design of the security system.The movements of the structure in the interrupter come true by micro-spring, so firstly, the calculation formula of spring constant of some common micro-springs in the linear range is derived. By comparison, S-shaped micro-spring is choosed for the interrupter, and the affection of every parameter to the spring constant is analysed. This part lay the foundation for the design of the interrupter.The structure of interrupter is designed based on the design of the micro-spring, and is simulated by ANSYS, the result of simulation proves the feasibility of the structure. Then the structure is improved based on the problems in fabrication and experiments.Then technics of LIGA technology and UV-LIGA technolory are studied, and UV-LIGA technology is choosed to fabricate the structure. Process is designed for the two-layer structure, and the structure fabricated by the process could match the expectation.At last, experiments of micro-spring force and acceleration impact are carried on. The experiments led up to the fact that the structure designed could satisfy the requirement.