The Ultrasonic Frequency Vibration Of The Composite Pulse Electrolysis Micro-finishing Mechanism And Experimental Research

With the development of science and technology,function integration,ultra-precision and miniaturization have become the direction of high technological produces.Micro-machining technology applied in Micro-Electro-Mechanical Systems (MEMS) has gained the great attention in academe,industrial field and governments.It is considered as one of the important marks of national manufacture level,which determines the machining accuracy and surface quality of mechanical produces.The researchment and current application situation of micro-manufacturing technologies are summarized, the recent applied state of micro-USM (Ultrasonic Machining) and micro-USM combined ECM (Electrochemical Machining) manufacturing technologies are analyzed.In order to solve the problem of manufacturing for conductive hard and tough materials, Ultrasonic vibration combined PECM (Pulse Electrochemical Machining) micro-machining is proposed as a new technology, and then study content of this paper are put forward.The basic principle, characteristic and technics of micro-USM ,micro-ECM and PECM are discussed, the feasibility and mechanism of Ultrasonic vibration combined PECM are analyzed, the mechanism of Ultrasonic vibration combined synchronous PECM is paid more attention to analyze. The technique advantage of Ultrasonic vibration combined PECM is expatiated.The test system scheme of Ultrasonic vibration combined PECM is built and improved.The machining parameters of the system can be adjusted in large range, low voltage and hydrostatic operating fluid of micro-ECM can be carried out.The circuit of Ultrasonic vibration and synchronous PECM is designed.The synchronization target is realized. The machining accuracy is improved.The machining tool applied in micro-machining field is very small; its request of accuracy is very high, so the design and manufacture of micro-tool-cathode is one of the key technology and difficulty in combined micro-machining. Many different shapes of tool-cathode are designed in this paper. The manufacturing methods of micro-tool-cathode are studied and perfected, such as WEDM (Wire Electric Discharge Machining), EDM"copy adding translate", combinative EDM,etc. With these means, several different micro-tools are successfully manufactured which are suitable for the request of Ultrasonic vibration combined PECM machining.Single process experiments of ultrasonic machining of micro-pits are carried on kentaniums(YT15, YG8), stainless steel, monocrystal line silicon, piezoceramics, glass with different tool cathodes;The mechanism test study of Ultrasonic vibration combined PECM is carried on YG8. On the basis,several parameters(such as pulse voltage, the quality pecentage of electrolyte,etc) contrast test of Ultrasonic vibration combined PECM are carried on YT15,YG8 and stainless steel.The maching parameters are optimized,then the preliminary test of Ultrasonic vibration combined synchronous PECM is carried.The test results indicate, micro-USM is a effective method for machining hard and brittle non-metal,but the working efficiency of machining hard and tough metals is very low,and the wastage of machining tool is big.But,the Ultrasonic vibration combined PECM has high working efficiency,good surface quality, furthermore,its micro-tool-cathode wastage is low. While Ultrasonic vibration combined synchronous PECM not only has high working efficiency,but also has better machining accuracy and surface quality.Thus, Ultrasonic vibration combined PECM micro-machining is a ideal method for manufacturing conductive hard and tough materials.In the end, the process technology of Ultrasonic vibration combined PECM micro-machining is analyzed and summarized. Furthermore, process problems, shortage and its improvement means are also suggested. Then further study works are put forward.