Micro-electrical And Mechanical Safety And Arming Device Key Technologies

Dexterity, rapidity and accuracy have been proposed a higher demand to weapon systems on the needs of modem warfare. In the forefront of destruction with the counter-destruction, fuze technology breakthrough is the key that the weapon system function improves most, this thesis presents a electromagnetism actuated MEMS fuze safety & arming (S&A) device applied in the directional warhead, it broke the traditional conception of S&A design. It uses the MEMS technology to realize the complanation and the microminiaturized design, it depends on the elecromagnetism suction rather than inertial mass arming the S&A.Several typical MEMS S&A structure characteristic and effect principle were analyzed abroad, then electromagnetism actuated MEMS fuze S&A design project was proposed on this basis. Using Solid Edge the MEMS S&A entity model was designed, and the LIGA parts figures and assemble figures were completed; the modelling and simulation with the ANSYS software to MEMS spring was carried on , spring coefficient of elasticity derivation formula was verified, and the relation between micro spring structure characteristic property and mechanics characteristic property was found out, force condition and kinetic characteristic have been simulated by ANSYS when the fuze S&A is under different environment force effect, it provided the guarantee for the optimization of MEMS S&A; finally the MEMS S&A sample chip was processed successfully by researching and improving LIGA process. After the test, flaw and question existing in the structure design were found, then the improved overall plan for next time sample trial-produce was proposed.