Development Of A Large-Stroke Three-Dimensional Micro-Displacement Worktable

The application of micro-nano measurement technology and the birth of micro-nano coordinate measuring machine(micro-nano CMM)have been greatly promoted with the rapid development of ultra-precision machining technology in recent years.The largestroke,high-precision positioning system is the critical foundation of the micro-nano measurement,the research and development of micro-positioning stages is of great significance.A novel large-stroke three-dimensional micro-displacement worktable based on the piezoelectric actuator has been proposed in this paper.The key technology of the microdisplacement worktable has been analyzed and studied combining the tandem configuration and the flexible hinge,taking the X-Y two-dimensional worktable as the research object.The movement configuration of the mechanism and the components of the stage have been selected,and a new large-stroke X-Y micro-displacement worktable has been analyzed and designed using theoretical calculation and finite element analysis.The main work of this paper includes:1.The transmission principle of lever amplification and flexible hinge based on the piezoelectric actuator was proposed.The design scheme of a novel large-stroke X-Y twodimensional micro-displacement worktable has been proposed,using theoretical calculation and finite element analysis.2.A compliant shifting pair with parallel four-bar mechanism for eliminating the coupling of the tandem structure has been proposed by theoretical calculation and finite element simulation of flexible hinges.The double parallel four-bar mechanism has finally been selected after discussion of the single parallel four-bar mechanism,the double parallel four-bar mechanism and the compound parallel four-bar mechanism.At last,an X-Y two-dimensional micro-displacement worktable with the elimination of coupling has been designed by combining with finite element analysis.3.A Z-direction micro-displacement worktable has been designed,combined with the design method of X-Y worktable.The performance and indicators of the designed three-dimensional worktable have been verified by finite element analysis.