Fuze Microcomputer Electrical Dynamic Transducer Design And Performance Of Numerical Analysis

MEMS (Micro-Electro-Mechanical Systems) is a very hot research field, it is now using in many kinds of industry. As a main part of fuze fluidic generators, energy transducer plays a very important part in the generator and fuze.At present, energy transducer in mainstream fluidic generators is electromagnetic type, but it usually has big volume, complex structure and low efficiency, so researching for new kinds of energy transducer with minisize structure can not only advance the efficiency but reduce the volume of fuze fluidic generators.This paper regarded the design of the jet generator piezoelectric transducer as a reference, and used MEMS technology to design a micro energy transducer for fuze physics generator. This new energy transducer used piezoelectric cantilever beams structure as main devices, and utilized pneumatic energy to make piezoelectric cantilever beams vibrate.In the first, this paper proposed 3 kinds of initial structures, and used Fluent and ANSYS to do lots of simulations under 0.3Ma wind velocity to compare which one is the best. Then, from the results of simulations, this paper improved the structure and determined the final structure type, used ANSYS software to make parameter optimization for the final structure. The volume fo the final structure was3mm×1.5mm×1mm, and would be processed in silicon substrate with MEMS technology. The maximum output powers of piezoelectric cantilever beams in the transducer were 11.4μW,6.39μW,3.75μW,2.75μW respectively, and the power density of the transducer was 1.22×103 W/m3.This paper designed the MEMS process routes of the structure in the end, including bulk micromachining technology, bonding technology, PZT preparation technology and so on.