The Research Of Titanium Film Deposited On Steel Surface By Magnetron Sputtering

Titanium which has the advantages of low density, high specific strength, corrosionresistance, high hydrogen storage performance, and is the most biocompatible metal material,is widely used in aerospace, marine, energy, construction, chemical industry and automobile,sports equipment and other fields of daily life. But as a result of the complex smelting processof titanium and the high cost, it makes titanium hardly used widely in civil and industrialscale. The titanium compound material is compared with titanium and steel which is theabundant raw materials and low price, by magnetron sputtering technique. As a result, notonly is its corrosion resistance superior to steel, that can expand the use field and the servicelife of materials, but also can reduce the production cost. In this way, the titanium can beprompted to widely used in industrial scale, and create enormous economic benefit.Comparing with other vacuum coating technology, magnetron sputtering havecharacteristics of high deposition rate, low substrate temperature and low damage; itssputtering film is uniform, dense, high purity, and good adhesion, also can be large deposited.It does not produce the rest of harmful waste gas in whole coating process, waste, and greenenvironment.This paper is about depositing a layer of titanium metal film on steel surface, andrespectively controlling parameters of sedimentary time, power, bias voltage, vacuum anddistance. Then the surface morphology of titanium film is observed with SEM and phase isdescribed with XRD. The corrosion resistance and mechanical properties of the compositematerial were studied too. The results is as following:1, The best process parameters for this research is that the coating time is100min; thepower is145.6W; the is Vacuum1.0Pa; the bias voltage is140V; the standoff distance is35mm.2, The titanium film prepared in the best process conditions has smooth coating surface,dense interface, few defects. In the Electrochemical corrosion test, the corrosion potential ofsteel-titanium composite material is more than positive substrate steel, having a stablepassivation area. In the immersion test, the corrosion rate of composites is34times as steel,showing excellent corrosion resistance.3, in the tensile test, the tensile strength is8.36MPa between the titanium film in theoptimum conditions and the base material, that are as2.2times as common zinc coating. itindicate their good film adhesion.The research on magnetron sputtering titanium is comparatively comprehensive. Itobtain a systematic study about how the titanium coating surface morphology, crystalstructure, sedimentary quantity and corrosion resistance to be effected by the varioustechnological parameters. Finally, the steel-titanium composite materials with good adhesionis made.