Study On Topology Optimization Design Of Micro-capacitive Accelerometer

The domestic existing micro accelerometer is mostly the products of low precision,narrow working frequency, low sensitivity, low horizontal interference obvious and so on, itseriously limits the scope of application of micro accelerometer. At present, the structuredesign of micro accelerometer with normal MEMS method lacks of the effective innovationdesign theory and method guidance, it exists the problems of experience and intuition design,The topology optimization of continuum structure stays in the concept design phase ofproduct, it is a kind of innovation design method and means, it could significantly improvethe product performance and reduce the research cost.The topology optimization of continuum structure material interpolation schemes anddepicting method are basis of topology optimization theory and its application. Theoptimization solution algorithm is the most important segment in topology optimization.Firstly, the SIMP material interpolation schemes based on topology optimization ofcontinuum structure are deeply researched and the related formulations are deduced. Thealgorithms fit for continuum structure is investigated. The characteristic and different usinglimit of optimization criteria (OC) method and the several numerical methods that overcomethe phenomenon of stability are analyzed in this paper. it is established for the furtherstructural research in theory and application of Micro-accelerometerThe above theory and algorithm for continuum topology optimization is applied on thestudy of Micro-accelerometer. Some design theory, coupling multi-physics problem forspecial domains including Micro-accelerometer are deeply researched. In consideration of thestructure volume ratio as constraint conditions, respectively, with maximum micro capacitiveaccelerometer structure of the first-order natural frequency, the structure transverse relativeflexibility and transverse anti-interference ability are established for the single objectivetopology optimization theory model; after micro capacitive accelerometer structure thermalexpansion, respectively, the output displacement response to the acceleration detectiondirection and the natural frequency of structure as combined target, the structure flexibilityand structure output deformation corresponding as composite target integrated multi objectivetopology optimization theory model, based on the SIMP materials interpolation model, usingthe weighted function target optimization strategy and the method of OC optimizationcriterion, development the micro capacitive accelerometer structure of single objective andmultiple objectives function topological design principle research, theory model and sensitivity analysis under the constraint conditions of volume ratio, obtained a variety of newoptimal topology in comprehensive meet different performance parameters condition of microcapacitive accelerometer elastic beam and the mass,it provides the reliable evidence for thefurther structural shape optimization and size optimization design.Finally, based on the structure topology optimization material interpolation method ofmicro capacitive accelerometer, the optimization algorithm and engineering applicationresearch of topology optimization theory, it develops a structural topology optimizationalgorithm prototype system based on the Matlab and Hyperworks software, it provides aneffective innovative design method and tool for micro capacitive accelerometer.