Development Of New Wide-Range Vacuum Gauge

Vacuum gauge is a kind of vacuum measuring instrument. It is widely used in scientific research and industrial process. The first part of this paper introduces status, species and trend in development of the vacuum gauge. The second part of this paper presents the theory and the operating circuit of the electric resistance gauge and the hot-filament ionization gauge. Then we bring forward a design scheme of a new wide-range vacuum gauge. At present, module complex vacuum gauge and sensors complex vacuum gauge are widely used when people measuring a wide range vacuum environment. Module complex vacuum gauge means the circuit of the different sensors are made of different module. And these module are assembled a multi-sensor vacuum gauge. The use of this kind of vacuum gauge are restricted on some occasion where there is only one sensor can be used. Sensors complex vacuum gauge means the sensors of the different range of the vacuum are integrated in one shell of pipe. It can be used as same as one sensor. But the fabrication process of this kind of sensor is complex and it is expensive. Otherwise the different sensors will interfere each other and impact the measurement accuracy. Different from the two kind of the complex vacuum gauge our design of the new wide-range vacuum gauge measure the wide range of the vacuum from 1.0×1.05Pa～1.0×0-5Pa by using the method of the electric resistance gauge and the hot-filament ionization gauge in a standard ZJ-2 hot-filament ionization sensor. The third part of this paper explains the design and debug of the hardware and software of the new wide-range vacuum gauge. The paragraph about hardware introduces the theory and design process of the control circuit, working power supply, display module, sampling module, communication module and protective circuit. And the paragraph about software presents the program flow of the SCM and compute. After that it explains the serial-communication protocol in detail. At the end of the paper we summarize the design of the new wide-range vacuum gauge.