The Design And Research Of Thermocouple Vacuum Gauge

Vacuum technology is an important part of modern science and technology,it promotes and facilitates the development of technological research and production. Vacuum measurement is one of its important parts.Vacuum gauges as a vacuum measurement device has many types,their sensitivity,measuring range and application are different because of the limitations of various measuring methods.Under the drive of electronics and computer technology's rapid development,acuum gauge's design and research is moving on the direction of integration,high-precision,miniaturization, systematization and intellectualization.Thermocouple vacuum gauge is widely used in low vacuum measurement field owing to its stable performance,anti-stain,anti-oxidation,moderate price,etc.But the sensor of vacuum gauge tube has strong non-linear,so there are lots of problems in data processing.In order to improve the measurement accuracy we must process the non-linear problem.The traditional numerical calculate method has heavry calculation and complex processing.In the article, we firstly studied thermocouple vacuum gauge's basic structure and working principle,then made specific design according to its characteristics.This design used the higher mode fitting in Mathematica software to fit thermocouple vacuum gauge's nonlinear.Finally,we used vacuum gauge tube as a sensor to convert the pressure signal in measured environment to weak electrical signal,after signal amplification and A/D conversion,then sent the signal into the MCU for data processing and display.The thermocouple vacuum gauge takes MCU as a core,can be applied to vacuum degree measuring in low vacuum field.Its measuring accuracy and stability meet the practical needs,and it's function having strong practicability can also be expanded according to the practical application.