The Research Of Integration Of Micro Thermocouple Vacuum Gauge

The characteristics of integrated thermocouple vacuum gauge include highmeasuring accuracy, high stability, continuous measurement and long service life. Withthe rapid development of science and technology, aerospace, microelectronics industry,the nuclear industry and some other advanced technology has put a higher demand onthe basis of crude low vacuum measurement. On one hand, it requires the accuracy ofthe measurement to avoid the impact of the environment on the results. On the otherhand, it requires a quick release, portability and user-friendly quick test. Therefore, it’san urgent need to develop an integration of micro thermocouple vacuum gauge forportable scene special environment and conditions.This paper developed an integration of micro thermocouple transmitter based onthe principle of thermocouple vacuum measurement. The digital signal processingtechnology has been applied for the extension of measuring range and theminiaturization. The device can adapt to the complex environment, and it has a lightweight, a small size and is easy to carry.The test result shows that the test range of the device has reached0.01Pa~1000Pa.The maximum power is less than10W. The operating supply is AC220V±10%/50Hz.The operating environment temperature with a dimension of100mm×60mm×45mm,and it weighs less than1.5kg.