Space Curved Surface Laser Direct Writing Technology Research

In China, laser direct writing is developing rapidly, which can make the desired pattern on the surface of subjects by using laser beam and a variety of materials to produce physical and chemical reactions, and mainly be used in micro-machining of various materials;thin platinum film resistors is the measurement of temperature sensitive components, the developing of which is limited by their traditional way of making, laser direct writing technology for trimming thin platinum film resistors is studied for improving production efficiency and reducing costs.Main works of this dissertation as follows:First, film thickness of2microns platinum resistors were manufactured using laser direct writing of using laser wavelength which is1065nm. The mechanism on the fabrication of thin platinum film resistors by laser direct writing was discussed. Take article type platinum resistors for example, the effect of the laser focus and the laser parameters on the platinum resistors trimming was studied, the optimized laser parameters are obtained.Second, different trimming programs are designed for different shape of the substrate thin platinum film resistors, and different light source and fixture platform are designed for improving the trimming accuracy.Third, the laser beam center is positioned in the image of the visual imaging system. The goal origin is positioned accurately by using different positioning algorithms.Fourth, graphics writing and validation is realized in the shape of the film plating different substrate.Fifth, the design and achieve of new function at software system is introduced.Characteristic of this articles as follows:First, laser direct writing is innovatively applied to different shapes of silica basement film platinum resistors preparation.Second, the optimal direct writing effect is achieved by optimization of laser parameters. Third, different trimming programs are designed deftly for different shape of thin platinum resistors, and the cylindrical, article type, hemisphere of three thin platinum film resistors are prepared.Fourth, the origin of the targeting accuracy is guaranteed by using of the algorithm to compensate for the lack of machining accuracy.