| The micro displacement technology plays an important role in modern industry and scientific research field. It directly influences the accuracy of precision and ultraprecision process, fine measurement accuracy and GSI manufacturing level. The whole performance has defect and the demand of environment is strict in the developed precision and ultraprecision stage. This paper's purpose is to look for the design precept of balanced performance for laying a kind of the micro displacement-working table in which friction gear actuates the flexible hinge with balanced performance and fitting the industry environment by researching on key technology of precision stage.In the article we introduced the theory of the flexible hinge, and proposed the dynamic model of the flexible hinge that this topic needs, this structure is one kind of two-stage series symmetrical balance structure. As well as, we have analyzed the friction gear theory, the transmission principle of work, the friction gear choice of material and the friction gear structural design.According to the analysis of the structure and the working principle of the micro-displacement table, the control system of hardware and software were designed, including A/D module, D/A module, interface processing module and so on. The instruments, such as power supplier, sensor and so on are configured according with the demands and cost, Which express the perfect reliability and easy manipulation.The experiments displayed that the micro displacement-working table in which friction gear actuates the flexible hinge can meet the requirements of high stiffness and accuracy. The system has a 28μm stoke ,±0.05μm precision. It is proved that the system has a good performance with low cost, small volume, high reliability and friendly interface. The experimental result indicated the micro displacement system have the accuracy and the feasibility and achieved the system design request, which may further study performs to improve the application. |
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