Testing System Research On Surface Flaws Of Optical Components In Optical System

With Application of optical technology in various field, the instrument precision needs higher and higher. So optical components as the important part of the optical system is required high precision. There are many parameters to evaluate the quality of the optical system. The paper focuses on research of testing method of surface defects, especially the measurement problem of the optical components in optical system.Based on researching the standard of surface defects and the testing methods in various countries, the paper gives a total design scheme for the testing system of surface defects based on zoom imaging technology. The important parts in testing system has been designed and chosen. The paper analyses the design theory of zoom optical system, and then gives a design result of zoom optical system by ZEMAX. The optical system has the focal length range:57mm-520mm, and the zoom ratio:9:1.Finally, the test accuracy of the whole testing systemare is analyzed, and the estimate accuracy of the system is0.006mm.