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Research On Structure And Mechanical Properties Of Electromagnetic Excitation AlCrN Hard Films Deposited By Multi-arc Ion Plating

Posted on:2015-06-14Degree:MasterType:Thesis
Country:ChinaCandidate:Z ChenFull Text:PDF
GTID:2271330470462004Subject:Materials Science and Engineering
Abstract/Summary:PDF Full Text Request
In this study, the electromagnetic excitation AlCrN films were deposited by multi-arc ion plating technique. The surface morphology, morphology of wear trace, chemical composition and phase structure of the films were analyzed by means of FEINANOSEM 430 type field emission scanning electron microscope(FESEM), Oxford type energy dispersive spectroscopy(EDS), Bruker D8 Advance type X-ray diffractometer(XRD), Thermo ESCALAB 250 type Xray photoelectron spectroscopy(XPS) and JEM-2010 F type transmission electron microscopy(TEM). The hardness, adhesion strength and wear resistance of the films were measured with XP/G200 type nano-indenter, Matsuzawa MMT-7 type Knoop indenter, HT-3001 type scratch tester and HT-2005 type pin-on-disk(POD) high temperature wear tester, respectively. From the experimental results, the following conclusions could be obtained.The deposition rate of the film deposited at magnetic-coil voltage of 30 V reached to the maximum value and the root-mean-square roughness of the film surface reached to the minimum value. The XRD, XPS and TEM results indicated the main solid-solution phase(Cr,Al)N, AlN and Cr2 N phase existed in the films and the films all grew in columnar crystal form. In addition, the preferential orientation(111) plane of the film appeared when increased magnetic-coil voltage to 30 V. The hardness of the film deposited at 30 V was enhanced by solid solution hardening mechanism to 43 GPa, meanwhile, the film possessed lower friction coefficient and higher H/E value than that of the films deposited at 10 V and 20 V. The film deposited at 30 V exhibited better wear resistance at room temperature and high temperature than that of the films deposited at 10 V and 20 V.With increasing magnetic-coil frequency, the atomic concentration of Al element and the deposition rate of the film both increased, but the number and size of solid macroparticles on film surface increased due to a stronger ions bombardment effect. The XRD and TEM results indicated that the main solid-solution phase(Cr,Al)N, AlN and Cr2 N phase existed in the films and the films all grew in columnar crystal form. The intensity of diffraction peak of the film deposited at 11.1 Hz was lowest. In addition, the XPS results revealed that the film deposited at 33.3 Hz possessed a higher bonding energy of Al 2p3/2, Cr 2p3/2 and N 1s than that of the films deposited at 1 Hz and 11.1 Hz. The film deposited at 33.3 Hz demonstrated highest microhardness, lowest friction coefficient and best wear resistance. The film deposited at 20 V and 11.1 Hz exhibited best adhesion strength.
Keywords/Search Tags:Multi-arc ion plating, Magnetic-coil voltage and frequency, AlCrN, Structure, Mechanical properties
PDF Full Text Request
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