Study On Bonding Process Of Ion - Conductive Polymer PEO-LiX And Al Under Strong Electrostatic Field

The research and development of Micro-Electro-Mechanical System has now become a frontier science, it got continuous development with the semiconductor integrated circuit Micro machining technology and the development of the ultra precision machining technology. Anodic Bonding as a kind of connection technology that has advantages of low temperature,low destructive and reliable connection performance,connecting dissimilar materials especially the connection of glass(ceramic) and metal materials have been widely used, but due to the glass or ceramic is brittle and weak shock resistance makes its application is limited.Ion conductive polymer PEO-LiX because its not only has the corrosion resistance of glass(ceramic), the characteristics of compact and light,good plasticity that glass(ceramic) does not have the advantage of making the ion conductive polymer PEO-LiX application has the practical significance in the anodic bonding.This paper application of ball grinding process for the preparation of PEO-LiX ion conductive polymer, after many experiments contrast it is concluded that the optimum process parameters of ball mill: the orbital speed of 200 r/min, grinding time 8h, ball material ratio 10:1,application of the ball mill process parameters were more groups of different composition and ratio of ion conductive polymer PEO-LiX powder sample, the sample after the press medium voltage into a unified size wafer anodic bonding experiment record key seasonable current time characteristic curve, and combined with the performance was studied for the samples after the bonding.Research techniques including X-ray diffraction analysis(XRD), scanning electron microscope(SEM) observation,depth of field microscopic observation, dispersive spectrum(EDS) analysis, etc.Analysis:the PEO:LiClO4=10:1,preheat to 100℃, bond when the voltage is 800 v by bonding specimens of bonding of the best, only a small portion of the aluminum foil to divest from the ionic conductive polymer PEO-LiClO4, carbon and oxygen ions from lateral migration aluminum foil on one...