| With the popularization of wearable devices, people have higher requirement for the surface quality of industrial production. The series of Ti NC wearable decorative films are based on the pure Ti N deposition, which is C-doped. For C-doped Ti NC films can gain color as deep yellow, brown, coffee, purple and black. Besides, the series of Ti NC wearable decorative films have an excellent property on wear-resisting,anti-corrosion and biocompatibility, have been widely used on jewelry, mobile phone frame and shell, smart watches.The color controlling is the necessary process during the development of each series of Ti NC wearable decorative films.In this paper, a series of Ti N and Ti NC multilayer graded wearable decorative films have been prepared by middle-frequency unbalanced magnetron sputtering. Spectrophotometer and SEM-EDS are being used to analysis the color values and ingredient of Ti N and Ti NC films prepared under different process, in order to analysis the influence of N2 and C2H2 which as the reaction gas on the films color. The study involves on N2 and C2H2 flows, stability time during color layer deposition phase.The experimental results and the conclusions of the analysis are listed as the following:(1) The flow of N2 has a great influence on the value of b*, with the increase of N2flow the color of the films change as light gold, gold, to deep gold.(2) Extended stable Ti N thin film color layer deposition time also can get the changing rule of the color from yellow to dark yellow, longer duration of stable film yellow degree value of b * and red values a * are increasing, brightness L *value decreases.(3) N2 flow rate exceeds a certain value, the stable time is too long, the aerated of N2 flow starting value is too large or too fast will appear sputtering target material poisoning phenomenon, in the event of a target poisoning plasma glow red, a * values increase sharply, L * values fell sharply, film change to red and dark.(4) Adding C2H2 into the reaction gas can achieve C-doped Ti N, after doping Ti NC film red value of a * increases obviously, thin film to the direction of the red and yellow, which broadens the scope of implementation of Ti N decorative film series color.(5) As C2H2 flow increases and the extension of stability time, the films’ color change from golden, yellow, brown, purple, to black, by adjusting the color layer stability time can realize effective control of color.(6) Thin film color values under different process conditions change curve appears to slow after the quick index of functional change rule, with the increase of the reaction gas flow or stable time film color first, slow then the pace of change accelerated gradually.(7) Through the different colors of Ti NC film composition analysis, there is a corresponding relationship Ti film color and metal content, film composition of metal thin film color deepen Ti the proportion of reduced gradually.(8) Comprehensive contrast of Ti N under different process conditions and Ti NC series of decorative color change rule and the film layer composition change rule, research suggests that chemical compounds such as Ti N and Ti NC generated mechanism mainly occurred in the surface of target, through the role sputtering deposition to the basal surface. Ti N and target material surface and the generation of the Ti NC compounds could sharply reduce the metal Ti component sputtering rate, resulting in the change law of exponential film color.(9) Various performance test results show that the intermediate frequency unbalanced magnetron sputtering method of multi-layer wearable Ti N and Ti NC decoration film normal synovial layer density, coating adhesion is strong, excellent wear resistance and corrosion resistance. |
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