The Deposition And The Corrosion Performance Of FeCrCoNiMn High Entropy Alloy Thin Films

High entropy alloys as a promising new alloy, It is more and more attention in recent years, the properties research of the block high entropy alloys are more and more, and the same time,its excellent properties of high entropy alloys laid a strong foundation as a coating or film material, but the deposition and properties research of high entropy alloys films is few, so this paper choose Fe Cr Co Ni Mn high entropy alloys as the target material, high entropy alloy thin films were deposited by rf magnetron sputtering method, the deposition technology and its corrosion resistance will be studied.Fe Cr Co Ni Mn high entropy alloy thin films were deposited by rf magnetron sputtering method in 304 stainless steel substrates and Si(100) silicon substrate. the first, the target material and the thin film of chemical composition were analyzed using EDS and EPMA respectively, it is concluded that the components of high entropy alloy target and thin films have these five elements Fe, Cr, Co, Ni, Mn, which are close to the mole ratio. The second, different deposition process parameters impact on structure, thickness, surface morphology, and analyze the cause of regularity. By XRD and SEM analysis, it showed that thin film structure change is not obvious within a certain amount of sputtering power and with the increase of sputtering power. They are amorphous structure, the thickness of the film is increased,the surface of the films become rough, density is reduced, but when the sputtering power increases to a certain value,the thickness of thin film decrease due to the large power, the structure of the films is crystalline structure, and the grain is bigger and bigger,surface morphology becomes coarse.With the increase of sputtering substrate temperature, the thickness of film increases, the particles of the thin film is coarsening, the thin films become more dense at low temperatures. As the extension of sputtering time, the thickness of the film is increased due to the low power sputtering, there is not enough energy for the migration and diffusion in a short of sputtering time, making the latter sputtering particles covered the original particles,which has not diffused and migrated.The power is 120 w, sputtering time is 2 hours, Fe Cr Co Ni Mn high entropy alloy films were deposited different temperatures do potentiodynamic polarization curves in1 mol-1L H2SO4 solution, 1 mol-1L Na OH solution, in 3.5% Na Cl solution respectively,as a result, the corrosion resistance of films were deposited under different temperatures were analysised. Studies have shown that the corrosion resistance in 1mol-1L H2SO4 solution is better than 304 stainless steel, thin films have the better corrosion resistance at the lower the temperature of the substrate, corrosion type isuniform corrosion. In 1 mol-1L Na OH solution, Fe Cr Co Ni Mn high entropy alloy films corrosion resistance is better than that of 304 stainless steel, the corrosion resistance of thin films which were deposited under different substrate temperature were similar in 1 mol-1L Na OH solution, film corrosion type is uniform corrosion. In 3.5% Na Cl solution, the substrate temperature is 100 ℃, Fe Cr Co Ni Mn high entropy films have the best pitting corrosion resistance, the corrosion type is pitting corrosion. the films had done polarization test were analysised by SEM and EDS, as a result, corrosion morphology and component content of different regions verified systemic regularity of corrosion resistance of the film.