Development Of Three-dimensional Precision Linear Probe

As coordinate measuring machines, gear measuring centers and other precisionmeasuring instruments of the core components Probe represents the technological levelof the instrument in a sense. Three-dimensional precision linear probe is essentially aminiaturization of the coordinate measuring machine, and it’s technology also are mostcomplexity in all kinds of of the probe,that essentially represents a country’s level ofMeasuring Instruments. The the producted of several three-dimensional precision linearprobe in the world are basically use of three reed nested structure. This structure existsshortcomings that movement quality and the dynamic characteristics are inconsistent inthe various direction. For technical status of the current probe, developed a new type ofthree-dimensional precision linear probe, the main contents are as follows:（1）On the basis of a comprehensive studyof precision technologydevelopmentprocess of the probe at home and abroad, analyzed the advantages and disadvantagesof the main structure of the used probe, proposed a design that measurement motionwas decomposed into a planar motion and one along the axial movement of the stylus.This is not only a good way to overcome the shortcomings of the unequal quality ofeach axis movement and inconsistent of the dynamic characteristics, but also its "co-planar" structure reduces the impact of Abbe error on measurement accuracy.（2）This paper analyzes the characteristics of the mechanical structure of thethree-dimensional precision linear probe,which constructed of several basic modulesof the double parallel spring mechanism and hinge mechanism, finally designded thestructure of probe meetting the Abbe principle; analyzed the structural characteristicsof three type of zero mechanism and the two self-locking mechanism, established thetype of reversing institutions and the type of monolithic spring zero self-locking mech-anism; made structural design and calculation aboat the key components of the probe,and calculation of the axial stiffness of various designs and sizes, adjust the structure ofdesigns and sizes to make isotropic.（3）Calculatedandadjustedequivalentmassmovementofeachaxisoftheprobe,the quality of each axial movement been made equal; Used the software of Pro/E andAnsys Workbench to establish a collaborative three-dimensional geometric model ofthe probe, A whole probe of modal analysis and harmonic response analysis and staticcharacteristics analysis was maded, dynamic analysis and static mechanical analysis ofkey components were analyzed and static characteristics were compared with the theo-retical calculation analysis.（4）Analyzes the various error sources of the probe, and focused analysis andcalculation of the guiding mechanism error,principle error, Abbe integrated error, de-formation error of measuring rod,deformation measurement error of the ball touchingthe workpiece and dynamic measurement error, and Analysis the way of the reduction system error; decomposited of the probe measurement accuracy indicators, analyzedthe factors affecting the measurement accuracy, and then conducted a precision designand distribution.