Design And Research Of High Vacuum Metal Single Crystal Growth Furnace

Recently, with the rapid development of electronic and technology, and the increasing amount of ultra-fine high-fidelity transmission wire, requirements of its performance also increasing. The single crystal copper material eliminate the lateral boundary, and have the performance of good fidelity and plasticity. So the single crystal copper material are the first choice for super slim fidelity. The main role of high vacuum solid phase method of metal single crystal growth furnace is keeping the samples from the solid phase of high temperature into the solid phase of low temperature slowly and evenly. Then we can achieve the solid phase of low temperature metal single crystal. So precisely controlling metal single crystal growth furnace temperature gradient and precisely controlling the speed of the sample is the technical key point to design the single crystal growth furnace.Firstly, this thesis mainly design the overall structural of the high vacuum metal single crystal growth furnace. The design includes the furnace structure design of the growth furnace, design of specimen mobile mechanism and vacuum container design. In the design for the chamber of furnace on the growth furnace. Putting out the furnace thermal insulation layer with 4 layers of molybdenum and 4 layer stainless steel structure. In the design of specimen mobile mechanism, using the spiral transmission to realize the specimen vertically moving. According to the steady state condition of vacuum, we could calculate the thickness of the vacuum chamber. Ensuring Material, cooling method and structure of the vacuum furnace.Secondly, using the thermal module of finite element analysis software to analyses the growth of furnace hearth. Establishing a three-dimensional model for growing furnace. Then, we will use finite element ANSYS workbench analysis software. Basing on the work situation of vacuum heating system, we could make the finite element thermal analysis for furnace chamber of growing furnace, and obtain steady-state temperature distribution cloud in a stable condition, simultaneously we can make comparative analysis for growing furnace of different materials. Finally, basing on the analysis results of temperature field, we can improve the structure of growing furnace.Finally, making a PLC control program for heating and cooling system of the vacuum growing furnace. Programing for the heating step of by PLC software upper growing furnace and down growing furnace, then basing on the heating conditions and heating mode, we can select appropriate heating wire material as heating elements of furnace.