Design And Preliminary Experimental Research Of Hydrodynamic Suspension Polishing Platform

Nano-film is widely used in engineering for it's special characteristics of mechanics, optics and electromagnetism. It's necessary to take the atomically smooth surface as substrate in the common ways to prepare nano-film, whether physical, chemical vapor deposition or electro-deposition, moreover, the characteristics of substrate make a significant influence on the quality of film. Therefore, improving the quality of substrate makes an important sense to the preparation of nano-film.A new polishing method named hydrodynamic suspension polishing was developed, the polishing platform was set up, and the related research was studied as following:(1) Hydrodynamic suspension polishing platform was designed and set up, which mainly consist of the selection and check of major parts in drive, lift, detection and spindle system. In the simulation of polishing platform, Ansys Workbench was used in modal analysis to get the natural frequency and in harmonic response analysis to get the response of displacement, velocity, acceleration in axially. It can be told that the polishing platform run reliably, because of first natural frequency avoids the exciting frequency which makes a greatest influence on axial response.(2) Hammering and Poly MAX method was used in experimental modal analysis(EMA) to get the natural frequency of polishing platform. The results of EMA was closed to the simulation, which further verified the accuracy of simulated model and the reliability of polishing platform.(3) Orthogonal experiment was designed to discuss the influence which rotation speed, clearance and concentrations makes on buoyancy by using Kistler sensor. The results show that rotation speed is greatest, clearance followed and concentrations at least.(4) Initial samples of electrolytic copper were prepared by Nano-MAX, final samples of ultra-smooth surface were produced by hydrodynamic suspension polishing platform, which were represented by Wyko, SEM, and TEM. The representation shows that the surface quality is better than the traditional.In conclusion, the method and platform of hydrodynamic suspension polishing have been preliminary proved.