An Experimental Study And Simulation Of Pressure Field Hydrodynamic Susupension

Nano-films have a wide range of application of microelectronics,optics,biology,energy and other field because of its special property of mechanical electric optical,magnetic,thermal and chemical competence.Depositing the substrate of the micro-level ultra-smooth surface is wildly needed in universal method to prepare nano-films such as ion-beam sputter deposition,electrodeposition,chemical vapor deposition and so on.Therefore,it is a difficult problem to be solved that preparing atomic-level ultra-smooth substrate of high quality in nano-films research field.To obtain substrate of high quality,this paper studied a research for a new method of hydrodynamic suspension polishing.This new method added constraint boundary to polishing plate,control the fluid movement so as to improve the dynamic pressure size and distribution of processing area,and get the substrate surface of less damage.The main research of this paper is as follow:Stated the hydrodynamic equation and dynamic pressure lubrication theory,studied movement characteristics of hydrodynamic suspension polishing fluid,analyzed the mechanism of hydrodynamic suspension polishing and introduced the structure model of tool plate of new hydrodynamic suspension polishing.Analyzed the influence of structural parameter of tool polishing plate on hydrodynamic pressure and distribution by the method of orthogonal test design,and finally got the result that the relationship between structural parameter and dynamic pressure is as follow: wedge width,restraint height,wedge angle and constraint length.(3)The pressure acquisition system was built to collect the hydrodynamic pressure under different processing speed and clearance.After analysis,it was proved that it was in accordance with the conclusion of numerical simulation experiment.The samples were prepared by electrolytic copper,and the samples were prepared by Nano-MAX polishing machine.The super-fine polishing was carried out on the hydrodynamic suspension polishing platform.The roughness and flatness of the processed samples were analyzed.A new method of floating suspension polishing can improve the surface roughness and flatness of the workpiece.In this paper,the influence of the parameters of the tool table and the parameters of the flow field on the dynamic pressure is analyzed by means of three-dimensional numerical simulation.The numerical simulation results are verified by experimental study and prove the reliability and feasibility of the new method.