Research On Detecting Method Of Spindle Rotation Accuracy Based On Analysis Of Interference Fringe Feature

With the rapid development of ultra-precision processing technology,the demand of higher precision is more and more urgent.Spindle is an important component of the machine and the accuracy of component is directly determined by spindle rotation error.Therefore the detection of spindle rotation error is of great significance and has become a very challenging subject.In addition,it has important significance for the improvement of spindle key components of ultra-precision machining equipment and the development of the ultra-precision equipment to develop a new method of detecting spindle rotation error to ultra – precision level.Firstly,a new method of detecting spindle rotation error by adopting the dynamic interferometer is proposed after all kind of detection methods proposed by domestic and foreign scholars have been systematically studied and the principle of spindle rotation error is analyzed.An experiment platform to detect the spindle rotation error of high precision servomotor is established and the spindle rotation error is obtained by analyzing the displacement of interference fringes.Secondly,real-time acquisition system of interference fringe image is designed after deeply research has been done on the feature of interference fringe image.The displacement of plane parallel crystal in vertical direction is obtained according to displacement measurement theory based on interference fringe tracking.Thirdly,interference fringes of different phases are collected by adopting the dynamic interferometer as plane parallel crystal rotates with Servomotor spindle.The edge image of interference fringe with high accuracy is obtained through the image processing of the original interference fringes.Processing such as gray value,median filter,expansive etching,binarization and edge extraction is successivelyperformed on the original interference fringes.At last,the spindle axial rotation error is obtained by tracking adjacent interference fringes pixels of equal gray value.Finally,the axial rotation error detection system of servomotor spindle based on the analysis of interference fringes feature is built and the experiments are carried out as well.The accuracy and applicability of this method proposed in this paper are verified by the experimental data,and the experimental error is analyzed on this basis.