Development And Solidification Technology Of Polycrystalline Silicon Crystallization Furnace

In the energy shortage,the deterioration of the environment today,the rapid development of renewable photovoltaic power generation industry,has gradually become an important part of the world's energy,which polysilicon photovoltaic industry is one of the important raw materials for solar cell production.At present the market is not specifically for teaching and research cheap low-cost polysilicon crystal furnace.The minimum installed capacity of Zhejiang Jinggong 5 kg polycrystalline silicon ingot furnace price of about 500,000,not suitable for most of the new energy laboratory.In view of this,the main content of this thesis is to develop a small polycrystalline silicon experimental crystallization furnace,and use it to carry out some melting experiments.The program is a heating method for the original flame heating,the temperature field is easy to control and fundamentally change better than other ways.This approach is different from the less common flame melting single crystal growth mode,because in the case of melting the silicon case temperature is much greater than the melting point of the nozzle material,which is the flame melting method is not the technical difficulties,and then because of the The crucible in the program is in the heat field to rely on radiation evenly heated,rather than the material in the flame melting.In the program two,the DC power supply by the mos field effect of chopper push-pull output IF AC,the supply of induction heating coil,the crystallization furnace is fully enclosed air,with charcoal to sacrifice anode deaerator,the pressure increases,the one-way valve conduction Pressure relief.The innovation of the scheme is that the directional solidification method is: intermittent pulling,pulling for a period of time,stopping for a longer time,allowing the crystal growth to be disturbed by the energy fluctuation caused by the vibration,and the intermittent pulling is realized by the single-chip control stepping motor.The motor drive uses the spwm subdivision technique,which makes the mechanical movement of the pulling machine smooth.The experiment results show that the design of the crystal furnace is reasonable,fully meet the expected design objectives,which can effectively improve the quality of polysilicon products and smelting process parameters adjustable and convenient.Smelting experiment.